3D impact-based ALN/SUS microenergy harvesters for multi-directional and low-frequency vibrations

Le Van Mink, Suguru Igarashi, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, we developed the novel three-dimensional (3D) impact-based microenergy harvesters for harvesting random vibrations from multiple directions. The device consisted of a 3D box built up from the flexible AlN/SUS-based microcantilevers and the free-moving SUS ball. When the ball receives external vibration energy, it might strike the cantilevers on the surrounding walls and then the device generates electricity. The merit of this configuration is the device could generate the electricity from low frequency and multi-directional vibrations. The developed device provided the peak output power 70 nW on average for the triaxial vibrations at the extremely low frequency of 4.5 Hz which frequency regime is very difficult to be harvested by the published microenergy harvesters.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages624-627
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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