3D imaging of elemental distributions using multi-angle RBS 2D-data

Y. Oishi, K. Hotta, K. Ishii, Y. Komori, S. Matsuyama, H. Yamazaki, Ts Amartivan, M. Rodriguez, K. Katoh, D. Izukawa, K. Mizuma, T. Satoh, T. Kamiya, T. Sakai, K. Arakawa, M. Saidoh, M. Oikawa

Research output: Contribution to journalConference articlepeer-review

Abstract

We developed a novel technique to obtain 3D-imaging of elemental distribution based on multi-angle RBS measurement and micro-beam scanning. Since cross-sections of RBS are too small to obtain 3D-imaging, it is necessary to measure scattered particles with large solid angle detectors. Hence, the RBS profiles from each scattering angle are superposed and a true depth profile cannot be obtained. Recently, a large solid angle X-ray detector array consisting of 45 detector elements was installed at the TIARA facility of Japan Energy Research Institute. Each detector element measures X-rays as well as scattered particles. For this utilization, we introduced a technique to superpose RBS profiles and applied it to the surface analysis of an ant's head.

Original languageEnglish
Pages (from-to)117-122
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume210
DOIs
Publication statusPublished - 2003 Sep
Event8th International Conference on Nuclear Microprobe Technology - Takasaki, Japan
Duration: 2002 Sep 82002 Sep 13

Keywords

  • High-efficiency RBS measurement
  • Micro-PIXE analysis
  • Micro-RBS analysis

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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