3D atomic imaging of SiGe system by X-ray fluorescence holography

Koichi Hayashi, Y. Takahashi, E. Matsubara, K. Nakajima, N. Usami

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


X-ray fluorescence holography (XFH) provides three-dimensional atomic images around specific elements without any assumption of the structural model. Six X-ray holograms Si0.8Ge0.2/Si at different energies were measured at the synchrotron radiation facility of SPring-8. Si and/or Ge atoms within 0.7 nm of a radius were clearly visible in the atomic images reconstructed from the holograms. From these images, slight displacements of the images at each shell in between Si0.8Ge0.2/Si and the Ge bulk were distinctly revealed. This demonstrated that the XFH method has a great potential to quantitatively analyze a three-dimensional local lattice structure in epitaxial crystals.

Original languageEnglish
Pages (from-to)459-462
Number of pages4
JournalJournal of Materials Science: Materials in Electronics
Issue number5-7
Publication statusPublished - 2003 May
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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