3D-architected and integrated metal oxide nanostructures and beyond produced by three-dimensional nanotemplate pulsed laser deposition

Azusa N. Hattori, Yasushi Fujiwara, Kohei Fujiwara, Hidekazu Tanaka

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

A novel nanofabrication technique, namely three-dimensional (3D) nanotemplate pulsed laser deposition, that can typically be useful for metal oxides has been developed by combining inclined pulsed laser deposition with a 3D nanotemplate prepared by nanoimprint lithography. This method enables the production of size-adjustable and extremely small functional oxide nanostructures with a high packing density over a large area, with high controllability of their shape, location, and alignment. We report various 3D functional metal oxide nanostructures, such as a luminescent ZnO nanobox structure, a ferromagnetic semiconductor (Fe,Zn)3O4 nanobox structure, an (Fe,Mn)3O4 epitaxial nanowall wire structure, and an in-plane metal-oxide-semiconductor hetero epitaxial nanowire structure. These nanostructures should be good candidates for optoelectronic, spintronic, and electronic nanoscale device applications.

Original languageEnglish
Pages (from-to)279-283
Number of pages5
Journale-Journal of Surface Science and Nanotechnology
Volume13
DOIs
Publication statusPublished - 2015 Jun 6
Externally publishedYes

Keywords

  • Metal oxide
  • Nanoimprint lithography
  • Pulsed laser deposition
  • Three-dimensional nanostructure

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Condensed Matter Physics
  • Mechanics of Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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