3-D photonic-crystal heterostructures: Fabrication and in-line resonator

S. Kawakami, T. Sato, K. Miura, Y. Ohtera, T. Kawashima, H. Ohkubo

Research output: Contribution to journalArticle

21 Citations (Scopus)


A heterostructured photonic-crystal functional chip consisting of a resonator and waveguides is fabricated by a simple "autocloning" process. First, we prepare a substrate with different corrugation patterns by electron beam lithography and dry etching, and Ta2O5-SiO2 multilayers are successively formed upon the substrate. An in-line resonator is fabricated and characterized by fiber-in-fiber-out measurement, and a resonance peak with Q = 270 is demonstrated. The future outlook for the technology is also discussed.

Original languageEnglish
Pages (from-to)816-818
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number6
Publication statusPublished - 2003 Jun 1


  • Autocloning
  • Optical resonator
  • Optical waveguide
  • Photonic crystal
  • Sputter deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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    Kawakami, S., Sato, T., Miura, K., Ohtera, Y., Kawashima, T., & Ohkubo, H. (2003). 3-D photonic-crystal heterostructures: Fabrication and in-line resonator. IEEE Photonics Technology Letters, 15(6), 816-818. https://doi.org/10.1109/LPT.2003.811334