Abstract
We have described key 3-D integration technologies for realizing the super-chip including through-Si via (TSV) formation, chip self-assembly, and boning. Regarding the TSV formation, we developed the low temperature W CVD process for low resistive interconnections. We also described a novel 3-D integration technology with chip self-assembly. In the super-chip integration technology, a large number of LSI chips can be simultaneously, quickly, and precisely aligned and bonded onto LSI wafers. We successfully fabricated several prototype 3-D LSI chips by using the super-chip integration technology.
| Original language | English |
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| Pages | 197-202 |
| Number of pages | 6 |
| Publication status | Published - 2008 Dec 1 |
| Event | 25th International VLSI Multilevel Interconnection Conference, VMIC 2008 - Fremont, CA, United States Duration: 2008 Oct 28 → 2008 Oct 30 |
Other
| Other | 25th International VLSI Multilevel Interconnection Conference, VMIC 2008 |
|---|---|
| Country | United States |
| City | Fremont, CA |
| Period | 08/10/28 → 08/10/30 |
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering