3-D calibration of an interference microscope

Xue Feng Qiang, I Ko, Satoshi Kiyono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A simple self-calibration technique is proposed for evaluating linearity errors of an interference microscope in the X- and Y- directions, which result from distortions of the CCD pixel arrays and objective lens. In this self-calibration technique, an inclined flat surface is used as the specimen. Two sets of profile measurement data before and after a small shift of the specimen in the X- or Y- directions are used to obtain the linearity error in each direction.

Original languageEnglish
Title of host publicationProceedings of the Second International Symposium on Instrumentation Science and Technology
EditorsT. Jiubin, W. Xianfang, T. Jiubin, W. Xianfang
Publication statusPublished - 2002 Dec 1
EventProceedings of the second International Symposium on Instrumentation Science and Technology - Jinan, China
Duration: 2002 Aug 182002 Aug 22

Publication series

NameProceedings of the Second International Symposium on Instrumentation Science and Technology
Volume2

Other

OtherProceedings of the second International Symposium on Instrumentation Science and Technology
CountryChina
CityJinan
Period02/8/1802/8/22

Keywords

  • Accuracy
  • Interference microscope
  • Measurement
  • Non-linearity
  • Profile
  • Self-calibration

ASJC Scopus subject areas

  • Engineering(all)

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