TY - GEN
T1 - 2.45 GHZ saw-based passive binary transponder for wireless interfaces of integrated sensors
AU - Kuypers, Jan H.
AU - Tanaka, Shuji
AU - Esashi, Masayoshi
PY - 2008/8/29
Y1 - 2008/8/29
N2 - This paper describes the development of a MEMS tunable surface acoustic wave (SAW) device that allows an integrated sensor to be interrogated wirelessly in a range of several meters. The component itself requires no power for the wireless communication, as the principle is based on evaluating the reflected signal similar to a radar echo. The structure is similar to a one port reflective SAW delay line device. A MEMS switch is used to modulate the SAW according to the binary sensor output. The encoding solely requires an electrostatic tuning voltage of as low as 3 V for the MEMS switch. We successfully demonstrated that the device assembled on a microstrip antenna wirelessly transmitted ASCII characters over a distance of up to 2 m.
AB - This paper describes the development of a MEMS tunable surface acoustic wave (SAW) device that allows an integrated sensor to be interrogated wirelessly in a range of several meters. The component itself requires no power for the wireless communication, as the principle is based on evaluating the reflected signal similar to a radar echo. The structure is similar to a one port reflective SAW delay line device. A MEMS switch is used to modulate the SAW according to the binary sensor output. The encoding solely requires an electrostatic tuning voltage of as low as 3 V for the MEMS switch. We successfully demonstrated that the device assembled on a microstrip antenna wirelessly transmitted ASCII characters over a distance of up to 2 m.
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U2 - 10.1109/MEMSYS.2008.4443837
DO - 10.1109/MEMSYS.2008.4443837
M3 - Conference contribution
AN - SCOPUS:50149096191
SN - 9781424417933
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1040
EP - 1043
BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Y2 - 13 January 2008 through 17 January 2008
ER -