2-axis resonant microstage using single piezoelectric moonie-type Microactuator

Yasuhiro Fujimura; Takashiro Tsukamoto; Shuji Tanaka

doi:10.1541/ieejsmas.138.516

2-axis resonant microstage using single piezoelectric moonie-type Microactuator

Yasuhiro Fujimura, Takashiro Tsukamoto, Shuji Tanaka

ENG - Robotics

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports a 2-axis in-plane resonator driven by a single piezoelectric actuator for a speckle dissolution device used in a laser-type projector. A PZT (lead zirconate titanate) unimorph actuator combined with a Moonie type displacement amplifier and 2-axis resonance structure was used to obtain large displacement. Both axes have different resonance frequencies (387.76 Hz and 323.34 Hz) and thus can be independently controlled by the single resonator with these frequencies superposed. The maximum displacement as high as 50 μm for both x- and y-directions was obtained. The proposed driving method can reduce the device size to about a half of the previously reported device with 2 actuators.

Original language	English
Pages (from-to)	516-522
Number of pages	7
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	138
Issue number	11
DOIs	https://doi.org/10.1541/ieejsmas.138.516
Publication status	Published - 2018 Jan 1

Keywords

Moonie actuator
PZT
Piezoelectric device
Speckle dissolution device

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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abstract = "This paper reports a 2-axis in-plane resonator driven by a single piezoelectric actuator for a speckle dissolution device used in a laser-type projector. A PZT (lead zirconate titanate) unimorph actuator combined with a Moonie type displacement amplifier and 2-axis resonance structure was used to obtain large displacement. Both axes have different resonance frequencies (387.76 Hz and 323.34 Hz) and thus can be independently controlled by the single resonator with these frequencies superposed. The maximum displacement as high as 50 μm for both x- and y-directions was obtained. The proposed driving method can reduce the device size to about a half of the previously reported device with 2 actuators.",

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AB - This paper reports a 2-axis in-plane resonator driven by a single piezoelectric actuator for a speckle dissolution device used in a laser-type projector. A PZT (lead zirconate titanate) unimorph actuator combined with a Moonie type displacement amplifier and 2-axis resonance structure was used to obtain large displacement. Both axes have different resonance frequencies (387.76 Hz and 323.34 Hz) and thus can be independently controlled by the single resonator with these frequencies superposed. The maximum displacement as high as 50 μm for both x- and y-directions was obtained. The proposed driving method can reduce the device size to about a half of the previously reported device with 2 actuators.

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