2-Axis MEMS scanner for a laser range finder

I. Aoyagi; K. Shimaoka; S. Kato; W. Makishi; Yusuke Kawai; S. Tanaka; T. Ono; Masayoshi Esashi; K. Hane

doi:10.1109/OMEMS.2011.6031035

2-Axis MEMS scanner for a laser range finder

I. Aoyagi, K. Shimaoka, S. Kato, W. Makishi, Yusuke Kawai, S. Tanaka, T. Ono, Masayoshi Esashi, K. Hane

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

11 Citations (Scopus)

Abstract

A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.

Original language	English
Title of host publication	Proceedings - OMN2011
Subtitle of host publication	16th International Conference on Optical MEMS and Nanophotonics
Pages	39-40
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2011.6031035
Publication status	Published - 2011 Dec 12
Event	16th International Conference on Optical MEMS and Nanophotonics, OMN2011 - Istanbul, Turkey Duration: 2011 Aug 8 → 2011 Aug 11

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	16th International Conference on Optical MEMS and Nanophotonics, OMN2011
Country	Turkey
City	Istanbul
Period	11/8/8 → 11/8/11

Keywords

Laser range finder
MEMS
scanner

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2011.6031035

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Aoyagi, I., Shimaoka, K., Kato, S., Makishi, W., Kawai, Y., Tanaka, S., Ono, T., Esashi, M., & Hane, K. (2011). 2-Axis MEMS scanner for a laser range finder. In Proceedings - OMN2011: 16th International Conference on Optical MEMS and Nanophotonics (pp. 39-40). [6031035] (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMEMS.2011.6031035

2-Axis MEMS scanner for a laser range finder. / Aoyagi, I.; Shimaoka, K.; Kato, S.; Makishi, W.; Kawai, Yusuke; Tanaka, S.; Ono, T.; Esashi, Masayoshi; Hane, K.

Proceedings - OMN2011: 16th International Conference on Optical MEMS and Nanophotonics. 2011. p. 39-40 6031035 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Aoyagi, I, Shimaoka, K, Kato, S, Makishi, W, Kawai, Y, Tanaka, S , Ono, T, Esashi, M & Hane, K 2011, 2-Axis MEMS scanner for a laser range finder. in Proceedings - OMN2011: 16th International Conference on Optical MEMS and Nanophotonics., 6031035, International Conference on Optical MEMS and Nanophotonics, pp. 39-40, 16th International Conference on Optical MEMS and Nanophotonics, OMN2011, Istanbul, Turkey, 11/8/8. https://doi.org/10.1109/OMEMS.2011.6031035

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title = "2-Axis MEMS scanner for a laser range finder",

abstract = "A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.",

keywords = "Laser range finder, MEMS, scanner",

author = "I. Aoyagi and K. Shimaoka and S. Kato and W. Makishi and Yusuke Kawai and S. Tanaka and T. Ono and Masayoshi Esashi and K. Hane",

year = "2011",

month = dec,

day = "12",

doi = "10.1109/OMEMS.2011.6031035",

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series = "International Conference on Optical MEMS and Nanophotonics",

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AU - Aoyagi, I.

AU - Shimaoka, K.

AU - Kato, S.

AU - Makishi, W.

AU - Kawai, Yusuke

AU - Tanaka, S.

AU - Ono, T.

AU - Esashi, Masayoshi

AU - Hane, K.

PY - 2011/12/12

Y1 - 2011/12/12

N2 - A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.

AB - A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.

KW - Laser range finder

KW - MEMS

KW - scanner

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T3 - International Conference on Optical MEMS and Nanophotonics

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BT - Proceedings - OMN2011

T2 - 16th International Conference on Optical MEMS and Nanophotonics, OMN2011

Y2 - 8 August 2011 through 11 August 2011

ER -

2-Axis MEMS scanner for a laser range finder

Abstract

Publication series

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Keywords

ASJC Scopus subject areas

Access to Document

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