@inproceedings{d668183043a04714b16c954f60461f06,
title = "2-Axis MEMS scanner for a laser range finder",
abstract = "A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.",
keywords = "Laser range finder, MEMS, scanner",
author = "I. Aoyagi and K. Shimaoka and S. Kato and W. Makishi and Yusuke Kawai and S. Tanaka and T. Ono and Masayoshi Esashi and K. Hane",
year = "2011",
month = dec,
day = "12",
doi = "10.1109/OMEMS.2011.6031035",
language = "English",
isbn = "9781457703362",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "39--40",
booktitle = "Proceedings - OMN2011",
note = "16th International Conference on Optical MEMS and Nanophotonics, OMN2011 ; Conference date: 08-08-2011 Through 11-08-2011",
}