2-Axis MEMS scanner for a laser range finder

I. Aoyagi, K. Shimaoka, S. Kato, W. Makishi, Yusuke Kawai, S. Tanaka, T. Ono, Masayoshi Esashi, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.

Original languageEnglish
Title of host publicationProceedings - OMN2011
Subtitle of host publication16th International Conference on Optical MEMS and Nanophotonics
Pages39-40
Number of pages2
DOIs
Publication statusPublished - 2011 Dec 12
Event16th International Conference on Optical MEMS and Nanophotonics, OMN2011 - Istanbul, Turkey
Duration: 2011 Aug 82011 Aug 11

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other16th International Conference on Optical MEMS and Nanophotonics, OMN2011
CountryTurkey
CityIstanbul
Period11/8/811/8/11

Keywords

  • Laser range finder
  • MEMS
  • scanner

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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