2 axes optical switch with holding mechanism

Akiyoshi Baba, Hiroaki Okano, Hisato Uetsuka, Masayoshi Esashi

Research output: Contribution to conferencePaper

13 Citations (Scopus)

Abstract

An optical switch which has a ratchet system to hold micro-mirrors without electric power has been studied. The micro-mirrors are supported by 2 axes torsion-bars and driven by Lorentz force caused by external magnetic field and coil current. The maximum tilted mirror angle of 23 degrees was obtained. The ratchets are Si beams, which are distorted by shrinkage of cured polyimide, and the micro-mirrors are symmetrically held between the beams. It was confirmed that the ratchets worked well to hold the micro-mirrors. The mirror was completely released by bending the beams thermally with electric current.

Original languageEnglish
Pages251-254
Number of pages4
Publication statusPublished - 2003 Jul 23
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 2003 Jan 192003 Jan 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period03/1/1903/1/23

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Baba, A., Okano, H., Uetsuka, H., & Esashi, M. (2003). 2 axes optical switch with holding mechanism. 251-254. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.