TY - GEN
T1 - 15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror
AU - Wu, T.
AU - Sasaki, Takashi
AU - Akiyama, Masayuki
AU - Hane, Kazuhiro
PY - 2013/12/1
Y1 - 2013/12/1
N2 - We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm× 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.
AB - We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm× 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.
KW - Au-Si eutectic
KW - continuous membrane
KW - deformable mirror
KW - integration technology
KW - single crystal silicon
UR - http://www.scopus.com/inward/record.url?scp=84891674795&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891674795&partnerID=8YFLogxK
U2 - 10.1109/Transducers.2013.6627314
DO - 10.1109/Transducers.2013.6627314
M3 - Conference contribution
AN - SCOPUS:84891674795
SN - 9781467359818
T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
SP - 2501
EP - 2504
BT - 2013 Transducers and Eurosensors XXVII
T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Y2 - 16 June 2013 through 20 June 2013
ER -