15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

T. Wu; Takashi Sasaki; Masayuki Akiyama; Kazuhiro Hane

doi:10.1109/Transducers.2013.6627314

15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

T. Wu, Takashi Sasaki, Masayuki Akiyama, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm× 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII
Subtitle of host publication	The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages	2501-2504
Number of pages	4
DOIs	https://doi.org/10.1109/Transducers.2013.6627314
Publication status	Published - 2013 Dec 1
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: 2013 Jun 16 → 2013 Jun 20

Publication series

Name	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country	Spain
City	Barcelona
Period	13/6/16 → 13/6/20

Keywords

Au-Si eutectic
continuous membrane
deformable mirror
integration technology
single crystal silicon

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

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10.1109/Transducers.2013.6627314

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Wu, T., Sasaki, T., Akiyama, M., & Hane, K. (2013). 15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 2501-2504). [6627314] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627314

15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror. / Wu, T.; Sasaki, Takashi ; Akiyama, Masayuki ; Hane, Kazuhiro.

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2501-2504 6627314 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wu, T, Sasaki, T , Akiyama, M & Hane, K 2013, 15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627314, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp. 2501-2504, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 13/6/16. https://doi.org/10.1109/Transducers.2013.6627314

Wu T, Sasaki T , Akiyama M , Hane K. 15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2501-2504. 6627314. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627314

Wu, T. ; Sasaki, Takashi ; Akiyama, Masayuki ; Hane, Kazuhiro. / 15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 2501-2504 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

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abstract = "We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm× 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.",

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author = "T. Wu and Takashi Sasaki and Masayuki Akiyama and Kazuhiro Hane",

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N2 - We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm× 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

AB - We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm× 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

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15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

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