Abstract
We have formed ferroelectric Sr2(Ta1-x,Nb x)2O7 (STN) film by using our developed 13.56 and 100 MHz coupled mode rf-sputtering system. For forming ferroelectric STN [perovskite Sr2(Ta1-x,Nbx)2O 7 phase], Ta and Nb are oxidized to a pentad, i.e., (Ta 1-x,Nbx)2O7 needs to be formed. The oxidations of Ta and Nb to pentad are difficult, because their ionization energies are very large. This means that oxygen vacancies exist in the films. We have successfully formed STN film whose oxygen vacancies are reduced by the coupled mode rf-sputtering system.
Original language | English |
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Pages (from-to) | 90-95 |
Number of pages | 6 |
Journal | Ferroelectrics |
Volume | 368 |
Issue number | 1 PART 2 |
DOIs | |
Publication status | Published - 2008 Dec 1 |
Event | 11th European Meeting on Ferroelectricity, EMF-2007 - Bled, Slovenia Duration: 2007 Sep 3 → 2007 Sep 7 |
Keywords
- Coupled mode rf-sputtering
- Kr/O2 plasma
- Oxygen vacancy
- Sr(Ta,Nb)O (STN)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics