(0 0 6)-oriented α-Al2O3 films prepared in CO2-H2 atmosphere by laser chemical vapor deposition using a diode laser

Yu You; Akihiko Ito; Rong Tu; Takashi Goto

doi:10.1016/j.mseb.2011.05.030

(0 0 6)-oriented α-Al₂O₃ films prepared in CO₂-H₂ atmosphere by laser chemical vapor deposition using a diode laser

Yu You, Akihiko Ito, Rong Tu, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

(0 0 6)-oriented α-Al₂O₃ films were prepared by laser chemical vapor deposition (LCVD) using aluminum acetylacetonate (Al(acac)₃) in CO₂-H₂ atmosphere. The effects of the CO₂ mole fraction (FCO₂) and laser power (P _L) on the crystal phase, microstructure, and deposition rate (R _dep) were investigated. α- and γ-Al₂O ₃ mixture films were prepared at P_L = 90 W (deposition temperature of 818 K), whereas (0 0 6)-oriented single-phase α-Al ₂O₃ films were obtained at P_L = 110 W (863 K). The texture coefficient and the grain size of the (0 0 6)-oriented films increased with increasing FCO₂. The orientation of the α-Al₂O₃ films changed from (0 0 6) to (1 0 4) to (0 1 2) with increasing P_L (T_dep). The R_dep of the (0 0 6)-oriented α-Al₂O₃ films increased with increasing FCO₂.

Original language	English
Pages (from-to)	984-989
Number of pages	6
Journal	Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume	176
Issue number	13
DOIs	https://doi.org/10.1016/j.mseb.2011.05.030
Publication status	Published - 2011 Aug 15

Keywords

Laser CVD, α-AlO
Morphology
c-Axis growth

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1016/j.mseb.2011.05.030

Cite this

@article{e4107d79f111480a8a7f9bb6e3a97a61,

title = "(0 0 6)-oriented α-Al2O3 films prepared in CO2-H2 atmosphere by laser chemical vapor deposition using a diode laser",

abstract = "(0 0 6)-oriented α-Al2O3 films were prepared by laser chemical vapor deposition (LCVD) using aluminum acetylacetonate (Al(acac)3) in CO2-H2 atmosphere. The effects of the CO2 mole fraction (FCO2) and laser power (P L) on the crystal phase, microstructure, and deposition rate (R dep) were investigated. α- and γ-Al2O 3 mixture films were prepared at PL = 90 W (deposition temperature of 818 K), whereas (0 0 6)-oriented single-phase α-Al 2O3 films were obtained at PL = 110 W (863 K). The texture coefficient and the grain size of the (0 0 6)-oriented films increased with increasing FCO2. The orientation of the α-Al2O3 films changed from (0 0 6) to (1 0 4) to (0 1 2) with increasing PL (Tdep). The Rdep of the (0 0 6)-oriented α-Al2O3 films increased with increasing FCO2.",

keywords = "Laser CVD, α-AlO, Morphology, c-Axis growth",

author = "Yu You and Akihiko Ito and Rong Tu and Takashi Goto",

note = "Funding Information: This study was supported in part by the Global COE Program of Materials Integration , Tohoku University. It was also performed as part of the Rare Metal Substitute Materials Development Project of the New Energy and Industrial Technology Development Organization (NEDO). This research was also supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (B), No. 22760550, and by the Ministry of Edu cation, Science, Sports and Technology, Grant-in-Aid f or Scientific Research (A), No. 22246082.",

year = "2011",

month = aug,

day = "15",

doi = "10.1016/j.mseb.2011.05.030",

language = "English",

volume = "176",

pages = "984--989",

journal = "Materials Science and Engineering B: Solid-State Materials for Advanced Technology",

issn = "0921-5107",

publisher = "Elsevier BV",

number = "13",

}

TY - JOUR

T1 - (0 0 6)-oriented α-Al2O3 films prepared in CO2-H2 atmosphere by laser chemical vapor deposition using a diode laser

AU - You, Yu

AU - Ito, Akihiko

AU - Tu, Rong

AU - Goto, Takashi

N1 - Funding Information: This study was supported in part by the Global COE Program of Materials Integration , Tohoku University. It was also performed as part of the Rare Metal Substitute Materials Development Project of the New Energy and Industrial Technology Development Organization (NEDO). This research was also supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (B), No. 22760550, and by the Ministry of Edu cation, Science, Sports and Technology, Grant-in-Aid f or Scientific Research (A), No. 22246082.

PY - 2011/8/15

Y1 - 2011/8/15

N2 - (0 0 6)-oriented α-Al2O3 films were prepared by laser chemical vapor deposition (LCVD) using aluminum acetylacetonate (Al(acac)3) in CO2-H2 atmosphere. The effects of the CO2 mole fraction (FCO2) and laser power (P L) on the crystal phase, microstructure, and deposition rate (R dep) were investigated. α- and γ-Al2O 3 mixture films were prepared at PL = 90 W (deposition temperature of 818 K), whereas (0 0 6)-oriented single-phase α-Al 2O3 films were obtained at PL = 110 W (863 K). The texture coefficient and the grain size of the (0 0 6)-oriented films increased with increasing FCO2. The orientation of the α-Al2O3 films changed from (0 0 6) to (1 0 4) to (0 1 2) with increasing PL (Tdep). The Rdep of the (0 0 6)-oriented α-Al2O3 films increased with increasing FCO2.

AB - (0 0 6)-oriented α-Al2O3 films were prepared by laser chemical vapor deposition (LCVD) using aluminum acetylacetonate (Al(acac)3) in CO2-H2 atmosphere. The effects of the CO2 mole fraction (FCO2) and laser power (P L) on the crystal phase, microstructure, and deposition rate (R dep) were investigated. α- and γ-Al2O 3 mixture films were prepared at PL = 90 W (deposition temperature of 818 K), whereas (0 0 6)-oriented single-phase α-Al 2O3 films were obtained at PL = 110 W (863 K). The texture coefficient and the grain size of the (0 0 6)-oriented films increased with increasing FCO2. The orientation of the α-Al2O3 films changed from (0 0 6) to (1 0 4) to (0 1 2) with increasing PL (Tdep). The Rdep of the (0 0 6)-oriented α-Al2O3 films increased with increasing FCO2.

KW - Laser CVD, α-AlO

KW - Morphology

KW - c-Axis growth

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