λ/8 Precision parabolic resonant varifocal mirror

Kenta Nakazawa, Takashi Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.

Original languageEnglish
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE Computer Society
Pages101-102
Number of pages2
ISBN (Electronic)9780992841423
DOIs
Publication statusPublished - 2014 Oct 14
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: 2014 Aug 172014 Aug 21

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period14/8/1714/8/21

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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