Yasuyuki Shirai

Specially Appointed Professor (Research)

  • 139 Citations
  • 7 h-Index
1994 …2020

Research output per year

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Research Output

Study on CF4/O2 plasma resistance of O-ring elastomer materials

Goto, T., Obara, S., Shimizu, T., Inagaki, T., Shirai, Y. & Sugawa, S., 2020 Jan 1, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 38, 1, 013002.

Research output: Contribution to journalArticle

  • 1 Citation (Scopus)

    Study on influence of O2 concentration in wafer cleaning ambient for smoothness of silicon (110) surface appearing at sidewall of three-dimensional transistors

    Suwa, T., Teramoto, A., Shirai, Y., Matsuo, T., Mizutani, N. & Sugawa, S., 2020 Apr 1, 237th ECS Meeting: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 10. Jagannathan, H., Kakushima, K., Timans, P. J., Gusev, E., Karim, Z., De Gendt, S., Misra, D., Obeng, Y. S. & Roo, F. (eds.). 3 ed. Institute of Physics Publishing, p. 23-29 7 p. (ECS Transactions; vol. 97, no. 3).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Open Access
  • Amorphous titanium-oxide supercapacitors with high capacitance

    Fukuhara, M., Kuroda, T., Hasegawa, F., Shirai, Y., Suwa, T., Hashida, T. & Nishijima, M., 2019 Jan 1, In : EPL. 128, 5, 58001.

    Research output: Contribution to journalArticle

  • Anodic oxidization of Al-Y amorphous alloy ribbons and their capacitive properties

    Fukuhara, M., Kuroda, T., Hasegawa, F., Shirai, Y., Hashida, T. & Konno, K., 2019 Mar 5, In : Journal of Alloys and Compounds. 776, p. 757-762 6 p.

    Research output: Contribution to journalArticle

  • 2 Citations (Scopus)