• 913 Citations
  • 17 h-Index
1991 …2020

Research output per year

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Fingerprint Dive into the research topics where Masaki Hirayama is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 11 Similar Profiles

Research Output

Open Access
  • Open Access
  • 2 Citations (Scopus)

    Effect of hydrogen on silicon nitrides formation by microwave excited plasma enhanced chemical vapor deposition

    Teramoto, A., Nakao, Y., Suwa, T., Hashimoto, K., Motoya, T., Hirayama, M., Sugawa, S. & Ohmi, T., 2015 Jan 1, Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5. Gusev, E. P., Timans, P. J., Roozeboom, F., DeGendt, S., Kakushima, K., Narayanan, V. & Karim, Z. (eds.). 4 ed. Electrochemical Society Inc., p. 151-159 9 p. (ECS Transactions; vol. 66, no. 4).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 3 Citations (Scopus)

    Ultra-low temperature flattening technique of silicon surface using Xe/H2 plasma

    Suwa, T., Teramoto, A., Goto, T., Hirayama, M., Sugawa, S. & Ohmi, T., 2015 Jan 1, Advanced CMOS-Compatible Semiconductor Devices 17. Omura, Y., Martino, J. A., Raskin, J. P., Selberherr, S., Ishii, H., Gamiz, F. & Nguyen, B. Y. (eds.). 5 ed. Electrochemical Society Inc., p. 277-283 7 p. (ECS Transactions; vol. 66, no. 5).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2 Citations (Scopus)

    Development and progress in thin film Si photovoltaic technologies

    Yoshida, I., Matsui, T., Sai, H., Suezaki, T., Nakao, S., Maejima, K., Katayama, H., Matsumoto, M., Sugiyama, S., Takeuchi, Y., Ushijima, M., Saito, K., Kondo, M., Tanaka, M., Nonomura, S., Shiratani, M., Konagai, M., Hirayama, M. & Niki, S., 2014 Oct 15, 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., p. 2832-2835 4 p. 6925520. (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution