Mai Phuong Nguyen

Specially Appointed Assistant Professor (Research)

  • 53 Citations
  • 4 h-Index
20112016

Research output per year

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Research Output

  • 53 Citations
  • 4 h-Index
  • 5 Article
  • 2 Conference contribution
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Article
2016

Characterization of patterned porous low-k dielectrics: Surface sealing and residue removal bywet processing/cleaning

Le, Q. T., Kesters, E., Decoster, S., Chan, B. T., Nguyen, M. P., Conard, T., Vanleenhove, A., Holsteyns, F. & De Gendt, S., 2016 Jan 1, In : ECS Journal of Solid State Science and Technology. 5, 3, p. N5-N9

Research output: Contribution to journalArticle

4 Citations (Scopus)
2015
17 Citations (Scopus)
2013
9 Citations (Scopus)
2012

Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure

Ablett, J. M., Wilson, C. J., Phuong, N. M., Koike, J., Tokei, Z., Sterbinsky, G. E. & Woicik, J. C., 2012 May 1, In : Japanese journal of applied physics. 51, 5 PART 2, 05EB01.

Research output: Contribution to journalArticle

5 Citations (Scopus)
2011
17 Citations (Scopus)